First name
T.P.
Last name
Ma
Kim, Y. ., Liu, Z. ., Jiang, H. ., Ma, T. ., Zheng, J.-F. ., Chen, P. ., … O’Neill, J. A. (2022). A Study on the Hf0.5Zr0.5O2 Ferroelectric Capacitors fabricated with Hf and Zr Chlorides. In 2022 China Semiconductor Technology International Conference (CSTIC) (pp. 1–3).