SummaryIn this study, the propagation and resonance properties of shear-horizontal surface acoustic waves (SH SAWs) on a rotated Y-cut 90°X propagating Ca3TaGa3Si2O14 (CTGS) with a Au- or Al-interdigital transducer (IDT) were investigated theoretically and experimentally. It was found that not only a high-density Au-IDT but also a conventional Al-IDT enables the energy trapping of SH SAW in the vicinity of the surface. For both IDTs, the effective electromechanical coupling factor of about 1.2% and the zero temperature coefficient of frequency can be simultaneously obtained by adjusting the cut angle of CTGS and the electrode film thickness.

2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)